| 摘要 |
PURPOSE:To obtain a membrane electronic device which is capable of stable use for a long time with anticorrosion under high temperature and high humidity condition by forming a functional element on a ceramic or a glass substrate, and also forming a membrane electrode of Cr-Cu-Ni structure as an electrode for the functional element. CONSTITUTION:An insulative layer 2 is formed on a ceramic or a glass substrate of a thermal head, and the layer is, for instance, a vitreous glazed layer. A resistor 4 is patternized on the insulative layer 2, and electrodes 6, 8 on the resistor 4. A protection film 10 is formed on the resistor 4 and electrodes 6, 8. A three-tier electrode of Cr-Cu-Ni which are arranged in that order starting from the bottom is used as the electrodes 6, 8. A solder bump can easily be formed on the Cr-Cu-Ni structure, and besides no intermetallic compounds are formed at 1,000 deg.C or lower, thus assuring improved reliability. Since the membrane electrode of Cr-Cu-Ni structure is used as an electrode for functional element, a highly reliable membrane electronic device may be available at low cost. |
