发明名称 |
Optical waveguides with embedded air-gap cladding layer and methods of fabrication thereof |
摘要 |
Waveguides having air-gap cladding layers and methods of fabricating waveguides having air-gap cladding layers are disclosed. A representative waveguide includes a waveguide core having an air-gap cladding layer engaging a portion of the waveguide core. In addition, a representative method of fabricating a waveguide having an air-gap cladding layer includes: providing a substrate having a lower cladding layer disposed on the substrate; disposing a waveguide core on a portion of the lower cladding layer; disposing a sacrificial layer onto at least one portion of the lower cladding layer and the waveguide core; disposing an overcoat layer onto the lower cladding layer and the sacrificial layer; and removing the sacrificial layer to define an air-gap cladding layer within the overcoat polymer layer and engaging a portion of the waveguide core.
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申请公布号 |
US6807352(B2) |
申请公布日期 |
2004.10.19 |
申请号 |
US20020074067 |
申请日期 |
2002.02.11 |
申请人 |
GEORGIA TECH RESEARCH CORPORATION |
发明人 |
MULE' TONY;MEINDL JAMES D.;GAYLORD THOMAS K.;GLYTSIS ELIAS N.;KOHL PAUL |
分类号 |
G02B6/10;G02B6/12;G02B6/122;G02B6/132;G02B6/136;G02B6/34;G02B6/43;(IPC1-7):G02B6/10 |
主分类号 |
G02B6/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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