| 摘要 |
PURPOSE:To form an inter-substrate spacing with good accuracy by specifying the content of a granular material in an adhesive agent contg. the granular material for maintaining the spacing between two sheets of the disk-shaped substrates each having a central hole. CONSTITUTION:The spacing between the disk-shaped substrates 1a and 1b each having the central hole is formed as the substrates are held at the outside peripheral edge and inside peripheral edge by the adhesive agent 3 contg. the granular material 6. The content of the granular material 6 in relation to the adhesive agent 3 is selected at 0.5-25wt.%. The number of particles is small and the required inter-substrate spacing cannot be made if the content is <=0.5wt.%. On the other hand, the coating of the adhesive agent to the substrate is difficult and the required inter-substrate spacing cannot be set if the content exceeds 25wt.%. The inter-substrate spacing is formable with good accuracy by specifying the content of the granular material in the above-mentioned man ner. |
