| 摘要 |
PURPOSE:To form a ball without making an apparatus large and without adjusting temperature in a highly safe manner, by turning plasma between a pair of electrodes into a plasma stream with a gas stream, guiding the plasma stream to the tip of wire, and forming the ball. CONSTITUTION:The tip of a wire 2, which is inserted in a capillary 1, is made to face a nozzle port 3a. Plasma is formed between electrodes 5 and 6 with a plasma generating power source 8. When inert gas is introduced in a path 4, the plasma reaches the tip of the wire 2 in the form of plasma stream. Thus a ball 2 is formed. Wire bonding is performed by using the ball 2a. |
