| 摘要 |
PURPOSE:To prevent the rapid falling of a flange and a rotary cylinder into a semiconductor material by specifying the shape of the flange for suspending an insertion hole, a pin, and a rotary cylinder of a rotary body in a titled apparatus to synchronize the rotary cylinder and the rotary body which are floated in a molten semiconductor material. CONSTITUTION:The manufacturing apparatus consists of a spider 11 of a rotary body, a pin 12, a coracle dam 13, and a coracle 14 of a flange. The pin 12 has keys 16 and 17 on the upper and lower ends, and is inserted and suspended in a small hole 15 with a key seat to synchronize the rotary body 11. The flange 14 has the protrusion 16 on the back surface so that the cylinder 13 fitted into the flange 14 may be suspended through the key 17. Firstly, the flange 14 and the cylinder 13 are hung by the key 17 of the pin 12 fixed to the rotary body 11, and separated from a glass sealing material 5 and a semiconductor material 6 in the crucible thereunder. Secondly, the materials are melted into 7 and 8, and the rotary body 11 is lowered to the boundary surface to float the flange 14 and the cylinder 13. The rotary body 11 is further lowered to detach the flange 14 from the key 17 so that only the pin 12 and the notch of the flange 14 may be kept in contact. Then the seed crystal of the semiconductor is dipped into the material 8 from the center of the cylinder 13, and pulled up slowly while rotating. |
