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发明名称
VORRICHTUNG ZUR PLASMACHEMISCHEN ANREGUNG FUER DIE EMISSIONSSPEKTROSKOPISCHE KONTROLLE VON GASGEMISCHEN
摘要
申请公布号
DD254781(A1)
申请公布日期
1988.03.09
申请号
DD19860296879
申请日期
1986.12.01
申请人
VEB ZENTRUM FUER FORSCHUNG UND TECHNOLOGIE MIKROELEKTRONIK,DD
发明人
MOENCH,JENS-PETER,DD;SUCHANECK,GUNNAR,DD;SCHADE,KLAUS,DD;MOELLER,RAINER,DD
分类号
G01N21/00;(IPC1-7):G01N21/00
主分类号
G01N21/00
代理机构
代理人
主权项
地址
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