发明名称 MONOMOLECULAR BUILT-UP FILM FORMING DEVICE
摘要 PURPOSE:To manufacture a monomolecular built-up film composed of many layers in a short time by partitioning the liquid surface part of developing water tanks having same liquid phase to prevent the developing substance on the liquid surface from being mixed and providing a fixed barrier fitted with a freely opening and closing gate permeating only a carrier. CONSTITUTION:In case a carrier 15 is descended to the position wherein developing substance A is developed on the liquid surface 4a of a developing water tank 1A and immersed thereinto, the monomolecular membrane of substance A is shifted and stuck on the surface of the carrier 15. Then the carrier 15 is parallel moved and passed through gates 11, 12 and transferred to a developing water tank 1B side. The carrier 15 is ascended from a developing water tank 1B developed with developing substance B, and at this time, the monomolecular film of substance B is built up on the monomolecular film of substance A stuck on the carrier 15. In this method, the removing work of developing substance which was heretofore performed in a single developing water tank can be obviated and the monomolecular built-up film composing many layers can be manufactured in a short time.
申请公布号 JPS6354933(A) 申请公布日期 1988.03.09
申请号 JP19860089416 申请日期 1986.04.18
申请人 KYOWA KAIMEN KAGAKU KK 发明人 KAMEI SHINICHI
分类号 B01D67/00;B01D69/12;B01J19/00;B05C3/02;B05D1/20;G01N33/68;H01L51/05;H01L51/40 主分类号 B01D67/00
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