METHOD AND DEVICE FOR MANUFACTURING HIGH-PURITY POLYCRYATALLINE SILICON BY ULTRASHORT-WAVE HEATING FLUIDIZED BED,申请号JP19860215588-传众专利搜索

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发明名称	METHOD AND DEVICE FOR MANUFACTURING HIGH-PURITY POLYCRYATALLINE SILICON BY ULTRASHORT-WAVE HEATING FLUIDIZED BED
摘要
申请公布号	JPS6355112(A)	申请公布日期	1988.03.09
申请号	JP19860215588	申请日期	1986.09.11
申请人	KANKOKU KAGAKU KENKYUSHO	发明人	IN YUTAKA;SOU EIBOKU
分类号	C01B33/02;B01J8/42;C01B33/027;C01B33/029;C01B33/03;C23C16/24;C23C16/442;H01L21/205	主分类号	C01B33/02
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