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发明名称
FILM CARRIER
摘要
申请公布号
JPS6354734(A)
申请公布日期
1988.03.09
申请号
JP19860197183
申请日期
1986.08.25
申请人
HITACHI LTD;HITACHI MICRO COMPUT ENG LTD
发明人
MIYAMOTO KEIJI;WAKASHIMA YOSHIAKI;ICHIHARA SEIICHI
分类号
H01L21/60
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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