发明名称 A METHOD FOR THE GROWTH OF A COMPOUND SEMICONDUCTOR CRYSTAL AND AN APPARATUS FOR THE SAME
摘要 A method for the growth of a compound semiconductor crystal using the sublimation method or the halogen transportation method, comprising maintaining the temperature of a limited portion of the crystal, which has just begun to grow, at a higher level than that of the crystal growth temperature, thereby attaining control of the crystallinity of the crystal at the initial growth stage, and an apparatus for the said method.
申请公布号 GB2194554(A) 申请公布日期 1988.03.09
申请号 GB19870017968 申请日期 1987.07.29
申请人 * SHARP KABUSHIKI KAISHA 发明人 MASAHIKO * KITAGAWA;YOSHITAKA * TOMOMURA;SATOSHI * YAMAUE;SHIGEO * NAKAJIMA
分类号 C30B23/00;C30B23/06 主分类号 C30B23/00
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