发明名称 Versatile system for triple-gated transistors with engineered corners
摘要 The present invention provides a system for producing a triple-gate transistor segment ( 300 ), utilizing a standard semiconductor substrate ( 302 ). The substrate has a plurality of isolation regions ( 304 ) formed along its upper surface in a distally separate relationship, defining a channel region ( 306 ). A form structure ( 308 ) is disposed atop the isolation regions, and defines a channel body area ( 310 ) over the channel region. A channel body structure ( 316 ) is disposed within the channel body area, and is engineered to provide a blunted corner or edge ( 318 ) along a perimeter of its upper exposed surface. The form structure is then removed, and subsequent processing is performed.
申请公布号 US6969644(B1) 申请公布日期 2005.11.29
申请号 US20040930273 申请日期 2004.08.31
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 VISOKAY MARK R.;CHAMBERS JAMES J.
分类号 H01L21/336;H01L29/78;(IPC1-7):H01L21/336 主分类号 H01L21/336
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