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发明名称
VERFAHREN ZUR ABSCHEIDUNG VON SILIZIUM-OXIDSCHICHTEN MITTELS PLASMA-CVD
摘要
申请公布号
DD254811(A1)
申请公布日期
1988.03.09
申请号
DD19860296926
申请日期
1986.12.02
申请人
VEB HALBLEITERWERK,DD
发明人
SWATON,ROLF,DD;KOEPKE,KLAUS,DD;BIERKE,HANS-JOACHIM,DD
分类号
H01L21/285;(IPC1-7):H01L21/285
主分类号
H01L21/285
代理机构
代理人
主权项
地址
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