AUTOMATIC DISPOSING AND WIRING METHOD FOR LOGIC CIRCUIT DEVICE,申请号JP19860199732-传众专利搜索

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发明名称	AUTOMATIC DISPOSING AND WIRING METHOD FOR LOGIC CIRCUIT DEVICE
摘要
申请公布号	JPS6354744(A)	申请公布日期	1988.03.09
申请号	JP19860199732	申请日期	1986.08.25
申请人	MITSUBISHI ELECTRIC CORP	发明人	SAKASHITA KAZUHIRO
分类号	H01L21/82;G06F17/50;H01L21/3205;H01L21/822;H01L23/52;H01L27/04	主分类号	H01L21/82
代理机构		代理人
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