| 摘要 |
<p>Disclosed are the probes (P) of an air gauge (10) with diffusers (D) which when brought into close relationship with a wafer (W) serve to reduce the velocity of the air (A) escaping from the periphery of the diffusers (D) to the point where, instead of a creating a vortex (V), any loose or floating particulate matter is blown off the wafer (W). Each diffuser (D) comprises a flat circular plate (22) affixed to, or forming a part of, the probe (P) substantially coplanar with the probe's exit orifice (20) thereby effectively increasing the diameter of the probe (P) at the interface with the wafer (W).</p> |
