| 摘要 |
PURPOSE:To manufacture a semiconductor electronic-part mount from which graphite powder is not desorbed and into which a washing does not permeate, by executing coating with glassy carbon consisting of the pyrogenous substance of an organic polymer onto the surface of a graphite member. CONSTITUTION:A vinyl chloride resin, polyvinyl alcohol, an oil-soluble phenolic resin, an alkylphenol resin, chlorinated paraffin, chlorinated polypropylene, a vinyl acetate resin, a polycarbonate resin, etc. are cited as an organic polymer used by this invention. The particulate matter or powder of these organic polymer is heated and thermally decomposed for thirty min at 200-500 deg.C in an inert atmosphere such as argon gas. However, it is preferable that the particulate matter or powder is not carbonized completely. A solution in which a pitchy substance acquired in this manner is added and dissolved to a solvent is applied onto the surface of a graphite member. The pitchy substance on the surface of the graphite member is vitrified through heating and baking for thirty min or more at 800-1300 deg.C under an inert atmosphere such as nitrogen, argon, etc. |
