CHARGED PARTICLE OPTICAL SYSTEM,申请号JP19860195384-传众专利搜索

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发明名称	CHARGED PARTICLE OPTICAL SYSTEM
摘要
申请公布号	JPS6353844(A)	申请公布日期	1988.03.08
申请号	JP19860195384	申请日期	1986.08.22
申请人	HITACHI LTD	发明人	HOSAKA SUMIO;TAMURA HIFUMI
分类号	H01J37/05;H01J37/317	主分类号	H01J37/05
代理机构		代理人
主权项
地址

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