| 摘要 |
PURPOSE:To enable high-speed and high-precision inspection, by making such composition that images on the similar members of a material to be inspected are observed in optical and electro-optical systems. CONSTITUTION:In an optical system 16 and an electro-optical system 17, such composition that images on the similar inspection members of a material 3 to be inspected are observed at any time in an observation part 12 through a switching control part 11 is made. Therefore, for example, by observing an objective pattern formed on the material 3 to be inspected such as a semiconductor wafer in comparison with the base part or the like by the use of the optical system 16, specification or the like of inspection members of the material 3 to be inspected can be performed with high speed. Furthermore, high-precision inspection can be performed on the basis of images of comparatively high orders obtained by the use of the electro-optical system 7, so that patterns or the like formed on the material 3 to be inspected can be inspected with high speed and high precision. |
