发明名称 |
Measuring head for vacuum gauge |
摘要 |
A measuring head for a vacuum gauge. An essentially cylindrical housing encloses a measuring cell which is sealed in a vacuum tight manner against the surrounding atmosphere and is connectable with an evacuatable cavity. A measuring filament for producing an electrical signal corresponding to the pressure in the measuring cell is disposed in the measuring cell. The measuring filament is disposed approximately perpendicularly to the axial direction of the housing.
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申请公布号 |
US4729241(A) |
申请公布日期 |
1988.03.08 |
申请号 |
US19860932493 |
申请日期 |
1986.11.20 |
申请人 |
LEYBOLD-HERAEUS GMBH |
发明人 |
FLOSBACH, RUDOLF;REICH, GUENTER;SCHUBERT, HANS-JOACHIM |
分类号 |
G01L21/12;(IPC1-7):G01L21/12 |
主分类号 |
G01L21/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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