| 发明名称 |
METHOD FOR PRODUCING GLOW POLYMERISATE LAYERS |
| 摘要 |
<p>20365-2398 Glow polymerisate layers can be generated on a substrate, starting from hydrocarbons and/or fluorocarbons, by means of a high-frequency, lowpressure glow discharge. Glow polymerisates completely saturated with hydrogen or fluorine are obtained when the glow discharge is carried out in the microwave range between 0.5 and 1.000 GHz and if the amplitude E0 of the effective field strength in the vicinity of the substrate no greater than 850 V/cm.</p> |
| 申请公布号 |
CA1233782(A) |
申请公布日期 |
1988.03.08 |
| 申请号 |
CA19840459316 |
申请日期 |
1984.07.20 |
| 申请人 |
SIEMENS AKTIENGESELLSCHAFT |
发明人 |
KLEEBERG, WOLFGANG;KAMMERMAIER, JOHANN;RITTMAYER, GERHARD;SCHULTE, ROLF-WINFRIED |
| 分类号 |
C08F2/00;B05D3/14;B05D7/24;C08F2/46;C08F2/52;C08F114/26;C08G85/00;C08J7/04;C23C14/12;(IPC1-7):C23C14/38 |
主分类号 |
C08F2/00 |
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