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经营范围
发明名称
INTER-PROCESS SENSING OF WAFER OUTCOME
摘要
申请公布号
EP1747575(A2)
申请公布日期
2007.01.31
申请号
EP20050747822
申请日期
2005.05.12
申请人
INFICON, INC.
发明人
CONNER, WILLIAM T.;GARVIN, CRAIG;LAKEMAN, STEVEN J.;TEPERMEISTER, IGOR;YANG, CHENGLONG
分类号
H01L21/67;H01L21/00
主分类号
H01L21/67
代理机构
代理人
主权项
地址
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