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申请公布号
JPS6335321(U)
申请公布日期
1988.03.07
申请号
JP19860129215U
申请日期
1986.08.25
申请人
发明人
分类号
H01L21/8238;H01L27/08;H01L27/092;H03H11/24;(IPC1-7):H03H11/24
主分类号
H01L21/8238
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