JIG FOR CHECKING LEAK OF BELLOWS FOR SEMICONDUCTOR EQUIPMENT AND APPARATUS FOR CHECKING LEAK THEREOF

摘要

A jig for checking leak of a bellows for semiconductor equipment and an apparatus for checking leak are provided to enhance a yield by shortening an exchanging time of the bellows. A first cap(20) is used for covering one end of a bellows in order to seal up the bellows. A second cap(30) is used for covering the other end of the bellows. The second cap includes an outlet. A plurality of shafts(40) are coupled with combination holes formed at both ends of the bellows between the first cap and the second cap by using a bolt. The shafts are used for maintaining a constant distance between the combination holes in order to prevent the contraction of the bellows.