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发明名称
FORMATION OF INTERCONNECTION
摘要
申请公布号
JPS6351659(A)
申请公布日期
1988.03.04
申请号
JP19860196097
申请日期
1986.08.20
申请人
NEC CORP
发明人
MOGAMI TORU;OKABAYASHI HIDEKAZU
分类号
H01L21/768
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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