| 摘要 |
An exhaust gas contg. as a toxic component at least one of arsine, phosphine, diborane and hydrogen selenide, is cleaned by contacting the gas with a moulded cleaning agent comprising (a) cupric oxide; and (b) at least one metal oxide from silicon oxide, aluminium oxide or zinc oxide, the agent having a density of 1.5-3.5 g/ml and a metal atomic ratio M/(M + Cu) = 0.02-0.7, in which Cu is the number of gram atoms of copper and M is the total number of gram atoms of silicon, aluminium and/or zinc. |
