| 摘要 |
PURPOSE:To manufacture a target material composed of titanium silicide sintered compact reduced in oxygen content, by compacting a powder consisting of Si and Ti in a specific atomic ratio and then by sintering the resulting green compact under specific temp. conditions. CONSTITUTION:A powder mixture consisting of Ti powder and/or Ti silicide powder and Si powder or a powder of an alloy consisting of Ti silicide and Si, both having an atomic ratio of Si to Ti of 2.1-4.0, is press-compacted. The resulting green compact is sintered at a temp. between the eutectic temp. of Ti silicide and Si and the melting point of Ti silicide, 1,330-1,500 deg.C. In this way, the target material composed of titanium silicide sintered compact with reduced oxygen content and forming a sputtering film free of peeling from a substrate and having relatively low seat resistance can be obtained. |
