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发明名称
Fremgangsmate for vatsyreetsing av AlGaInAsSb-strukturer og anvendelse av vatt, surt etsemiddel
摘要
申请公布号
NO324780(B1)
申请公布日期
2007.12.10
申请号
NO20020006261
申请日期
2002.12.27
申请人
LEIV EIRIKSSON NYFOTEK AS
发明人
BUGGE RENATO;FIMLAND BJORN-OVE
分类号
C23F1/30;H01L21/306
主分类号
C23F1/30
代理机构
代理人
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