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发明名称
ION SOURCE
摘要
申请公布号
JPS6348731(A)
申请公布日期
1988.03.01
申请号
JP19860193363
申请日期
1986.08.18
申请人
NISSIN ELECTRIC CO LTD
发明人
TAKANO SHINICHI;NOGAWA SHUICHI;YAMAHARA NOBORU;MATSUBARA KATSUO;INOUE YASUO
分类号
H01J27/08
主分类号
H01J27/08
代理机构
代理人
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