SUBSTRATE CONTAINER WITH OUTBOARD KINEMATIC COUPLING STRUCTURE

摘要

A substrate container having a set of kinematic coupling grooves defined in the periphery of a horizontally extending skirt portion around the periphery of the container portion. This set of kinematic coupling grooves, being located outside the periphery of the container portion, enables the container to be positioned relatively closer to the Horizontal Datum Plane of wafer processing equipment. This can provide vertical space conservation along with greater stability than provided by the conventional location of kinematic coupling grooves. The container may also include a set of conventionally located kinematic coupling grooves.