SURFACE CLEANING DEVICE,申请号JP19860190540-传众专利搜索

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发明名称	SURFACE CLEANING DEVICE
摘要
申请公布号	JPS6348678(A)	申请公布日期	1988.03.01
申请号	JP19860190540	申请日期	1986.08.15
申请人	HITACHI LTD	发明人	SUZUKI SHOJI;ITO YASUSHI
分类号	B08B7/04;G11B23/50;H01L21/304	主分类号	B08B7/04
代理机构		代理人
主权项
地址

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