发明名称 Short-channel field effect transistor
摘要 An improved short-channel field effect transistor including a standard tip implant type of source and drain each disposed in the surface of a semiconductor substrate and a gate electrode positioned upon the substrate between the source and drain and control plugs disposed in the substrate and associated with and contiguous to the source and drain for eliminating substrate punch-through currents without substantially increasing the device junction capacitance.
申请公布号 US4729001(A) 申请公布日期 1988.03.01
申请号 US19830555248 申请日期 1983.11.25
申请人 XEROX CORPORATION 发明人 HASKELL, JACOB D.
分类号 H01L29/10;H01L29/78;H01L29/786;(IPC1-7):H01L29/78;H01L29/08 主分类号 H01L29/10
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