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经营范围
发明名称
METHOD AND DEVICE FOR ETCHING
摘要
申请公布号
JPS6347380(A)
申请公布日期
1988.02.29
申请号
JP19860192488
申请日期
1986.08.18
申请人
TOSHIBA CORP;SHIBAURA ENG WORKS CO LTD
发明人
NAKADA JUNJI;SHIMOI NOBUHIRO
分类号
C23F1/00
主分类号
C23F1/00
代理机构
代理人
主权项
地址
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