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发明名称
SCANNING CAPACITANCE MICROSCOPY
摘要
申请公布号
JPS6347601(A)
申请公布日期
1988.02.29
申请号
JP19860189562
申请日期
1986.08.14
申请人
TOSHIBA CORP
发明人
SUGIHARA KAZUYOSHI
分类号
G01B7/34;G01Q60/46
主分类号
G01B7/34
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代理人
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