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发明名称
以含贵重气体之双电浆氮化法增进CMOS氮氧化矽闸极介电层效能之方法IMPROVING CMOS SION GATE DIELECTRIC PERFORMANCE WITH DOUBLE PLASMA NITRIDATION CONTAINING NOBLE GAS
摘要
本发明提供一种在基材上形成一含矽氮层的方法。该层亦可能含氧并且做为氮氧化矽闸极介电层。在一态样中,形成该层的方法包括使一矽基材暴露于由氮气与一贵重气体所形成的电浆中,而将氮纳入该基材的上表面内,其中该贵重气体系氩、氖、氪或氙。退火该层,随后将该层暴露于一氮电浆中以将更多的氮纳入该层中。该接着再次退火该层。
申请公布号
TW200818336
申请公布日期
2008.04.16
申请号
TW096128741
申请日期
2007.08.03
申请人
应用材料股份有限公司
发明人
奥森克里斯多夫
分类号
H01L21/336(2006.01);H01L21/31(2006.01)
主分类号
H01L21/336(2006.01)
代理机构
代理人
蔡坤财;李世章
主权项
地址
美国
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