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经营范围
发明名称
SURFACE CLEANING DEVICE
摘要
申请公布号
JPS6346674(A)
申请公布日期
1988.02.27
申请号
JP19860188462
申请日期
1986.08.13
申请人
HITACHI LTD
发明人
SUZUKI SHOJI;ITO YASUSHI
分类号
B08B7/00;G11B23/50;H01L21/304
主分类号
B08B7/00
代理机构
代理人
主权项
地址
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