,申请号JP19860123323U-传众专利搜索

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法人/股东/高管

发明名称
摘要
申请公布号	JPS6329942(U)	申请公布日期	1988.02.27
申请号	JP19860123323U	申请日期	1986.08.13
申请人		发明人
分类号	H01L21/31;C23C14/56;H01L21/677;H01L21/68;(IPC1-7):H01L21/68	主分类号	H01L21/31
代理机构		代理人
主权项
地址

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