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发明名称
摘要
申请公布号
JPS6329928(U)
申请公布日期
1988.02.27
申请号
JP19860122601U
申请日期
1986.08.09
申请人
发明人
分类号
H01L21/31;H01L21/205;(IPC1-7):H01L21/205
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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