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发明名称
FORMING METHOD OF OHMIC ELECTRODE CONSISTING OF COMPOUND SEMICONDUCTOR
摘要
申请公布号
JPS6346724(A)
申请公布日期
1988.02.27
申请号
JP19860191388
申请日期
1986.08.15
申请人
NEC CORP
发明人
KONO MICHIHISA;KUZUHARA MASAAKI
分类号
H01L21/28;H01L21/265
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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