| 摘要 |
PURPOSE:To carry out low-temperature distillation for the production of high- purity liquefied nitrous oxide with an inexpensive small-sized apparatus and to reduce the consumption of cold heat source, by recovering plasma-excited nitrogen gas from a quartz tube in a state having low content of nitrogen oxide gas and introducing oxygen gas into the recovered gas. CONSTITUTION:Nitrogen gas flowing through a quartz tube 2 from one side to the other side (supplied from a nitrogen bomb 17) is subjected to plasma excitation with microwave irradiation (using a magnetron 3, a waveguide 4 and a plunger 5) to obtain an excited nitrogen gas. The gas flowing the center of the quartz tube 2 is collected at the downstream side of the microwave irradiation zone of the quartz tube 2 (collected from an inlet port 19 and introduced into a reactor 6) and the gas is made to react with oxygen gas (supplied from an oxygen bomb 7) to produce nitrous oxide gas, which is subjected to low-temperature distillation (with a low-temperature distillation apparatus 11). |
