GAS GUN FOR ION BEAM CVD,申请号JP19860189910-传众专利搜索

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发明名称	GAS GUN FOR ION BEAM CVD
摘要
申请公布号	JPS6345815(A)	申请公布日期	1988.02.26
申请号	JP19860189910	申请日期	1986.08.13
申请人	SEIKO EPSON CORP	发明人	IWAMATSU SEIICHI
分类号	H01L21/31;H01L21/205	主分类号	H01L21/31
代理机构		代理人
主权项
地址

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