| 摘要 |
<p>PURPOSE:To contrive to improve picture quality, reliability, and economy by using a pigment dispersed type printed filter as a color filter, and flattening the color filter and forming a transparent electrode below 180-250 deg.C. CONSTITUTION:A transparent conductive film 31 is formed on an organic transparent thin film 51 and patterned to obtain a transparent electrode 31. Further, ITO is used most generally for the transparent conductive film, but the film needs to be formed below 250 deg.C for the heat resistance of the color filter 23. For the purpose, the most effective method is a sputtering method and the film with excellent characteristics can be formed at relatively low temperatures. The ITO film formed by the sputtering method, however, is improved speedily in patterning performance by subsequent etching above 180-200 deg.C while decreasing specific resistance. namely, the temperature range between 180 deg.C and 200 deg.C is one of conditions under which the ITO film of good quality is formed without any color filter deterioration.</p> |
