| 摘要 |
PURPOSE:To saturate rapidly a creep phenomenon an electrostrictive element and improve positioning accuracy in the case of positioning with high accuracy using the electrostrictive element by mounting a heat sink at a partial surface of the electrostrictive element. CONSTITUTION:An electrostrictive element 1 is connected to an alumina board 4 and the alumina board 4 is joined on a brass board 5. After that, a strain gage 2 is glued on a surface of the above element 1. An output of the strain gage 2 is connected to an amplifier through a bridge and is connected to a recorder. It is preferable for the heat sink to be a good heat conductor and then not only metals such as aluminum and the like but also ceramics such as alumina, aluminum nitride and others are available. When an electric field is impressed, a temperature inside the electrostrictive element rises but is quickly reverted to a environmental temperature by installing the heat sink. Accordingly, the electrostrictive element used for fine positioning with high accuracy improves positioning accuracy. |
