SLURRY DELIVERY ARM

摘要

A slurry supply arm is provided to prevent the solidification phenomenon of slurry during the chemical mechanical polishing process. A slurry supply arm(20) comprises a body, a variable location type slurry supply nozzle(23) a first rinse fluid spray hole(24), and a rinse fluid supply nozzle(26). The variable location type slurry supply nozzle supplies the slurry to the grinding pad. The variable location type slurry supply nozzle is installed at the central part of the body and moves along the longitudinal direction of the body. First rinse fluid spray holes spray the first rinse fluid onto the grinding pad. The rinse fluid supply nozzle is installed between the edges of the body and the variable location type slurry supply nozzle. The rinse fluid supply nozzle can spray the second rinse fluid through a second rinse fluid spray hole(27) onto the grinding pad and body.