| 摘要 |
<p>A turbo-molecular pump comprising a rotor (16); a stator (22); a plurality of stages of alternately arranged rotor blades (10) and stator blades (18) which are respectively carried by the rotor (16) and stator (22); a first helical groove (12) which is formed either on the circumference of the rotor (16) or on the circumference of the stator (22) and which is disposed downstream of the said rotor blades (10) and stator blades (18); and second and third helical grooves (14,20) which are formed respectively on the circumferences of the rotor (16) and stator (22) downstream of the said rotor blades (10) and stator blades (18), the second and third helical grooves (14,20) being reversely threaded with respect to each other.</p> |
