Isolation material for layers in intergrated circuits with damascene archtitecture, comprising molecules having atoms at the surface only, like for example fullerenes

摘要

Insulating layer material for integrated circuits in damascene architecture contains or consists of molecules (I), with atoms only on the surface, that are separated from one another by other (groups of) molecules (II) having at least 2 positions bound by chemical and/or physical interactions with (I).