发明名称 STORAGE, STORAGE SET AND TRANSPORTING SYSTEM
摘要 A storage (10) unloads and loads a load (3) with a transporting carriage (2). The storage is provided with a port capable of transferring said load from or to said transporting carriage; a plurality of rack portions (15) capable of accommodating or putting said load thereon; a driving device (19) capable of moving said load between said port and said plurality of rack portions, and mutually between said plurality of rack portions; and a controlling device (20) for controlling said driving device to (i) firstly move said load to an temporary rack portion for unloading, which is one of said plurality of rack portions, and (ii), after once accommodating or putting said load on said temporary rack portion, move said load to said port from said temporary rack portion, in case of moving said load from said plurality of rack portions to said port.
申请公布号 US2009104006(A1) 申请公布日期 2009.04.23
申请号 US20080253291 申请日期 2008.10.17
申请人 ASYST TECHNOLOGIES JAPAN, INC. 发明人 MURATA MASANAO;YAMAJI TAKASHI
分类号 H01L21/677 主分类号 H01L21/677
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