METHOD FOR FORMING POLYCRYSTALLINE SILICON THIN FILM,申请号JP19860187332-传众专利搜索

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发明名称	METHOD FOR FORMING POLYCRYSTALLINE SILICON THIN FILM
摘要
申请公布号	JPS6342112(A)	申请公布日期	1988.02.23
申请号	JP19860187332	申请日期	1986.08.07
申请人	SHARP CORP	发明人	KAWAMURA AKIO;KUDO ATSUSHI;KOBA MASAYOSHI
分类号	H01L21/20;H01L21/324	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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