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发明名称
METHOD FOR CONTROLLING GAS FLOW RATE OF ION PLATING DEVICE
摘要
申请公布号
JPS6342372(A)
申请公布日期
1988.02.23
申请号
JP19860186197
申请日期
1986.08.08
申请人
ISHIKAWAJIMA HARIMA HEAVY IND CO LTD
发明人
OKABE SHUICHI
分类号
C23C14/54
主分类号
C23C14/54
代理机构
代理人
主权项
地址
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