发明名称 |
VACUUM PUMP, AND METHOD FOR OPERATING A VACUUM PUMP |
摘要 |
A vacuum pump, in particular a Roots vacuum pump, has a pump chamber (12) which is formed by a pump housing (10). Pump elements (14) which are driven by a drive motor are arranged in the pump chamber (12). A medium is pumped by the pump elements from the pump inlet (18) through the pump chamber (12) and from the latter through the pump outlet (20). In order to avoid overheating, a flow channel (24) is provided, through which at least if required medium can be returned from the pump outlet (20) to the pump inlet (18). A valve device (30) is provided in the flow channel. According to the invention, the valve device (30) can be regulated and, to this end, is connected to a regulating device (52). Furthermore, the invention relates to a method for operating the vacuum pump. |
申请公布号 |
WO2009074408(A2) |
申请公布日期 |
2009.06.18 |
申请号 |
WO2008EP65079 |
申请日期 |
2008.11.06 |
申请人 |
OERLIKON LEYBOLD VACUUM GMBH;SCHILLER, DIRK;JANICKI, MAGNUS;STEININGER, MICHAEL;HOELZEMER, MICHAEL |
发明人 |
SCHILLER, DIRK;JANICKI, MAGNUS;STEININGER, MICHAEL;HOELZEMER, MICHAEL |
分类号 |
F04C18/12;F04C28/26 |
主分类号 |
F04C18/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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