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发明名称
REDUCTION STEPPER
摘要
申请公布号
JPS6341021(A)
申请公布日期
1988.02.22
申请号
JP19860185538
申请日期
1986.08.06
申请人
NEC CORP
发明人
TSUTSUI HIROAKI
分类号
H01L21/30;G03F7/20;H01L21/027
主分类号
H01L21/30
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