| 摘要 |
PURPOSE:To measure the linear accelerations in a plurality of axial directions and the angular accelerations around a plurality of axes by one accelerometer, by boring a hole in a central rigid body part and providing extension parts from the central rigid body part in directions mutually crossing at an almost right angle. CONSTITUTION:When acceleration in an X-axis direction acts on a heavy body 14, said heavy body 14 receives force in said direction and this force is transmitted to a fixed part 12. In the transmission process of said force, parallel flexible beam structures 15a1, 15a2, 15b1, 15b2, 15c2, 15d2 show high rigidity against the force in said direction and almost no deformation is generated in said flexible beam parts thereof but deformation is generated in the flexible beam parts of parallel flexible beam structures 15c1, 15d1. This deformation is taken out as an electrical signal by a strain gauge and the acceleration in the X-axis direction can be known. When the angular acceleration around the X-axis acts on the heavy body 14, deformation is generated in the flexible beam parts of the parallel flexible beam structures 15c2, 15d2 and the angular acceleration around the X-axis can be detected. |
